Electron beam evaporator

time:2020-12-10Hits:338设置


Instrument   name

Electron Beam Evaporator

Model

PVD75

Manufacturer

KURT   J.LESKER COMPANY

Specifications

1.   Platen Size: Up to 12 (305 mm) diameter

2.   Electron Gun Power: 5-10 KW

3.   Ultimate Vacuum: 5×10-5 Pa

4. Pump   Speed: 3*10-4 Pa/20 min

5.   Heating : 350

6. Temperature   Uniformity: ±10

7.   Rotation: Variable up to 20 RPM

8.   Crucible Number: 4

9.   Coating uniformity: ±5%Al

10.   System Control: PC+PLC control

Function   and applications

Electron   beam evaporator is a universal metal coating machine, used for depositing of   single-layer or multi-layer metal film. It could be mainly used for the metal   electrodes preparation in the field of nano-device and organic photoelectric   device, and also for growth catalyst film layer.

Accessories

Mechanical   Pump

Contacts: Wenchang Zhu

Contact   number: 65881259

E-mail: wczhu@suda.edu.cn


Editor: Wenchang Zhu




























                                        

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